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Location: 530-127, 440 Escondido Mall Thursdays 4:30 Weekly ME342 team project updates 3:45-4:30pmHappy hour with speaker immediately following seminar |
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DATE |
SPEAKER |
COMPANY/TITLE |
Group Updates |
6 July |
Aaron Partridge |
SiTime |
A, B, C |
13 July |
Alissa Fitzgerald |
A.M. Fitzgerald & Associates, LLC Technical Consulting Services MEMS | Materials | Sensor Systems |
D, E, F |
20 July |
Tony Flannery |
Axept "Building a Startup from the Ashes of a Startup" |
A, B, C |
27 July |
Jeff Sampsell |
Qualcomm MEMS |
D, E, F |
3 August |
Pete Hartwell |
HP Labs |
A, B, C |
10 August |
TBD |
|
D, E, F |
Friday 18 August |
Final presentations 4-6 pm
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Location MERL back patio, 418 Panama Mall Poster session with refreshments |
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Reminder: MEMS2007 deadline is 8 August 2006
Login |
Project and Customer |
Students |
Coach and TA | Meetings Jul 5-Aug 9 |
me342a
|
vertical force sensing posts
Miriam Goodman Sung-Jin Park Beth Pruitt |
team_me342a@lists.stanford.edu
Sarah Coulthard, ME Nahid Harjee, EE Nathan Klejwa, EE Ron Kwon, ME
|
Dr. Aaron Partridge Sung-Jin |
Every other Wed 2-3 |
me342b |
Electromechanical Cell Interface
Oscar Abilez Feng Cao Beth Pruitt |
team_me342b@lists.stanford.edu Jennifer Blundo, ME Gretchen Chua, BME Yong-Lae Park, ME Ali Rastegar, EE |
Dr. Eugene Chow Joe |
Every other Wed 4-5 |
me342c |
On chip polymer testing
Vikram Mukundan Jeff Li Beth Pruitt |
team_me342c@lists.stanford.edu Sujay Bangalore Ramachandra , ME Ranadeep Bhowmick, Matl Sci Maryam Ziaei-Moayyed, EE Cheng-Chieh Chao, ME |
Dr. Pete Hartwell Vikram |
Every other Wed 3-4 |
me342d |
Micro 2 phase heat exchangers
Ken Goodson Juan Santiago |
team_me342d@lists.stanford.edu Milnes David, ME Topher Anderson, EE Tarun Khurana, ME |
Dr. Brian Stark Sung-Jin |
Every other Wed 2-3 |
me342e |
Gratings
Jay Provine Roger Howe |
team_me342e@lists.stanford.edu Rishi Kant, EE Shrestha Basu Mallick, AP Haneesh Kesari, ME Roozbeh Parsa, EE |
Dr. Eric Perozziello ericp@snf.stanford.edu Joe |
Every other Wed 4-5 |
me342f |
Magnetic nanofluidics Roger Howe |
team_me342f@lists.stanford.edu Katherine Tsai, EE Abishek Dhanda, ME Kwan-Kyu Park, ME Michael Pihulic, CEE |
Dr. Rob Candler Vikram |
Every other Wed 3-4 |
| Week | Lab | Tues | Thurs | Due |
|---|---|---|---|---|
1
Prep |
Lab 1 F 4/7 SNF Safety Training Tour. You must complete this training to take this course . | 4/4 Introduction to course pdf | 4/6 Cleanliness pdf, wetbenches. SNF clean room behavior video (Dr. Mary Tang) | 4/7 Completed safety test |
| Vid 1 Wed or Thur 7-9pm Durand 267, safety wmv1 wmv2 and gowning video wmv viewing | Review fabrication process and structures to be fabricated. Read ch. 10, pp 615-630 | Read and understand SNF Safety procedures. Signup for lab tour for Friday 9,10,or 11am. |
Must attend video viewing and pass the safety test. This test is due BEFORE your safety tour on Friday. Retake over the weekend if you fail | |
2
Prep |
Lab 2 Wetbench processing, clean and oxidized wafers-- wbdiff. pdf Lithography intro: svgcoat/svgdev/align, oxidation parameters xls different for each lab! SNF qualifies wetbench approx. 11am. |
4/11 Piezoresistors and Ion implant pdf pps Properties of silicon pdf1, pdf2 |
4/13 Etching (RIE/DRIE/Wet etching) pdf | 4/14 Homework #1 |
| Review procedures for cleanliness at: WBDIFF, WBNONMETAL, WBMETAL, WBLITHO (see SNF website) | Reading pp. 123-134 and pp. 183-206 | Skim rest of ch. 4 and all of ch. 2. Skim ch. 7 pp 379-423 | ||
3
Prep |
Lab 3 Lithography + intro to KarlSuss. Alignment of “Oxide open” mask. Wet etch oxide – WBNONMETAL. Strip and clean for metal deposition. pdf | 4/18 Lithography-soft, contact, projection pdf | 4/20 Film deposition, and materials selection pdf |
|
Watch training videos for SVGCOAT wmv and YESoven wmv. (Please download to watch) |
Read Ch 1 pp 1-32, skim pp 33-71 | Read Ch 3 pp134-143, skim to p175 Read Ch 5 & skim 344-357 Skim Petersen’s “Silicon as a mechanical material” pdf Optional additional articles: -MEMS force sensors for in-situ SEM/TEM mechanical characterization pdf-Material testing using MEMS actuators pdf -Micromechanical characterization of silicon and polysilicon films pdf |
4/21 Homework #2 | |
4
Prep |
Lab 4 Lithography - Alignment of “Metal etch” mask. qualify contact aligner (svgcoat, KS, svgdev) WBMETAL Al etch. Strip and clean wafers. pdf SNF qualify litho ~10 a.m. | 4/25 SUPREM simulation, Noise pdf | 4/27 Cantilevers and AFM. Beam Equations pdf | |
| Read Senturia Microsystems Design Ch. 16 & selected reading | ||||
5
Prep |
Lab 5 STS training - DRIE frontside etch. Strip/clean & litho. pdf SNF qualify STS & Gasonic ~10:30 | 5/2 Transduction methods (sensors and actuators) pdf | 5/4 Innovation & Team Dynamics. Needsfinding & Brainstorming pdf | 5/5 Homework #3 |
| Complete litho of Cantilever etch before your Lab session this week | Collect project preference data | |||
6
Prep |
Lab 6 STS/Matrix training - DRIE backside pdf |
5/9 Signal conditioning & Measurements | 5/11 Microfluidics | 5/12 Homework #4 |
| Complete litho of Backside etch before your Lab session this week | Skim Ch 9 | Read pp 1-15: Microfluidics: Fluid Physics at the nanoliter scale pdf Additional readings in Microfluidics section of Library |
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7
Prep |
Lab 7 Measurement Overview. Signal conditioning circuitry, instruments. | 5/16 Design Methodologies. QFD for MEMS pdf | 5/18 Concept selection pdf | 5/19 Homework #5 |
| These labs occur in MERL220! | Selected readings | Scan Ishii QFD Primer pdf Work on Part I of QFD Assignment as a team |
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8
Prep |
Lab 8 Cantilever Measurements. Intro to Noise and Analyzer | 5/23 Patents and IP, Linda Chao OTL pdf | 5/25 MEMS Packaging Issues pdf MEMS design: Introduction to L-Edit |
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| These labs occur in MERL220! Setup Test System. Take measurements over next 2 weeks | Laboratory Notebook Suggestions pdf Cleanliness Review pdf |
Skim Ch 8 sections on packaging and substrates, modeling pdf |
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9
Prep |
Lab 9 Measurements on Released Structures | 5/30 “Quick and Dirty” MEMS Processing pdf |
6/1 Biomedical Design Issues pdf | 6/1 Homework #6 |
Soft Lithography pdf Selected readings found on library page under "Quick and Dirty" Processing |
Skim selected readings found on the library page under Issues in Biomedical Design Skim Ch 7 pp 423-458 |
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| 10 | 6/5-9 Office hours Friday 6/9 1-5 MERL 220 for pre-review. | 6/6 No class | 6/8 No class | 6/9 Homework #7: Process cartoons, process steps, calculations related to design and sample L-Edit device layouts |
| Final | M 6/12 7-10 pm Cantilever Analysis and Project Presentations during exam period. |
Presentations on cantilever data and analysis, project design reviews. Turn in .ppt slides and all measurement data by email. | ||
| Paper due 6/14(Wed) | Design project reports due. Due by 12:00 to Doreen Wood in Durand 262 or Prof. Pruitt in Durand 281. |