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Labs
SNF Training Videos
Notes:
Unless noted, all lab homework assignments are due at the beginning of your next lab period.
It may help to actually view the ppt files in slide show form, as they include animation to help
visualize fabrication process.
Handouts
Lab Reader pdf
Process Run Handout pdf
Run Sheet pdf
Wafer Matrix pdf
Oxide Thickness pdf
Mask Design tdb tdo
Dektak Cantilever Thicknesses xls
Lab / Week |
Description |
Homework (due day of lab unless noted) |
1 |
SNF Safety Training |
The following are mandatory and must be completed before first day of labs: SNF Safety Training |
2 |
Wet Benches, Wafer Handling: pdf |
Turn in Multi-Wet Bench Test pdf , Wbdiff Test pdf, Wbnonmetal pdf, and Wbsilicide pdf with Homework 1. |
3 |
Photolithography I: Oxide Etch: pdf yes | svgcoat | svgdev | karlsuss | wbnonmetal |
Practice transferring dummy wafers in MERL220 Watch SNF training videos: YES oven, svgcoat |
4 |
Photolithography II: Aluminum Etch: pdf svgcoat | svgdev | karlsuss | wbmetal |
|
5 |
Plasma Etch I: Frontside Etch: pdf stsetch | gasonics | dektak |
Photolithography and oxide etch for frontside pdf |
6 |
Frontside and backside protect. Use "backside" mask. notes | |
7 |
Sensitivity: pdf |
Measurement Matrix xls |
8 |
Noise: doc | |
9 |
-- Group work time -- | |
10 |
-- Group work time -- |
The following videos were made by Stanford Nanofabrication Facility (SNF):