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Lecture Description |
Readings | Related Files |
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ME342 Overview |
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Cleanliness | SNF Cleanroom Practices SNF Equipment Groups |
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Properties of Silicon, Piezoresistors, and Implant; TSUPREM |
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TSUPREM Initialization cshrc
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Transduction |
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Lithography and Pattern Transfer |
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Surface Micromachining and Film Deposition |
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Etching |
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Brainstorming / Creativity / Innovation | Myers-Brigg Topology Six Hats xls |
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MEMS Reliability |
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Quality Function Deployment (QFD) | |||||
Beam Mechanics | |||||
Microfluidics |
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MEMS Packaging |
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Signal Conditioning and Measurements |
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"Quick and Dirty" MEMS Processing |
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Issues in Biomedical Design |
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Here are a few guides and resources available to help you with your design projects:
MEMS'06 Abstract format (example) Additional examples of project abstracts can be found in the Projects Archive.