ME342: MEMS Laboratory

Sponsored by: Nu Ions, Inc. (408.437.5761)
               
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Announcements:

Team project updates from 3:45-4:30pm, Thursdays. Project meetings every other Wednesday.

Details posted under Schedule.

Class Information:

Time / Location: Thurs 3:45 - 5:30 pm / Bldg 530-127
Required Text: Fundamentals of Microfabrication, 2nd ed., Madou
Prerequisites: Strong science or engineering background
Auditing: With permission of the instructor

 

Course Description:

Many micro/nano-scale measurement techniques using clever implementations of mechanical devices (e.g. cantilevers), do not require advanced integrated circuit designs, and can be adapted and cleverly applied to solve basic needs in the sciences and medicine by innovative teams. In this course, multidisciplinary teams composed of engineering and science graduate students (advanced undergraduates are also encouraged), and medical engineering graduate students are formed in order to tackle a specific problem of current interest to industrial and/or research sponsors.

The curriculum provides a unique opportunity to synthesize the knowledge from multiple disciplines and to apply the diverse skill sets of the teams to cutting-edge multidisciplinary problems leveraging innovation and applications in microtechnology. Students in this course will practice the application of these technologies to foster innovation and improve their problem-solving abilities. The driver for this comes from real-world need for their designs and the potential for entrepreneurship in the fast-growing fields of biotechnology and microtechnology.

The course will consist of two parts, given over two academic quarters. In the first (spring) quarter, emphasis is on MEMS design, customer interface, and the practical aspects of design (needs finding, brainstorming, evaluation and design methodology) and fabrication, including silicon wafer cleaning, photolithography, etching, oxidation, diffusion, ion implantation, and testing. Process physics, metrology, tolerances, and noise will be covered in lecture. Signal conditioning circuitry will be built, wirebonding demonstrated, test structures and sensors will be characterized electronically and mechanically, and compared to simulations and calculations. Once training in fabrication is complete, Affiliate projects are matched by interest and background to interdisciplinary teams, and teams are introduced to the Project Affiliates and mentors to define specifications and initial design requirements.

In the second quarter, emphasis is on design, prototyping, and characterization of devices as well as a strategic plan and study of the device and market. A weekly seminar lecture on materials timely to the projects (e.g. biology, materials selection, packaging, patents, productization and manufacturing issues) will be given in addition to a weekly project meeting of the teams with the mentors and instructors. Regular customer/team meetings throughout the quarter, or use of video-conferencing and at least one site visit where appropriate (e.g. for off campus partners). Outcomes include fabrication of prototype devices and appropriate signal conditioning and user interface, mechanical and electrical characterization of prototypes, and testing of devices. The final report and poster presentation documents customer requirements, final design and supporting analysis. Submission of papers from the projects will be encouraged and travel support may be available for those accepted at conferences agreed upon with Professor Pruitt in advance.

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